Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes

Chia Hua Chan; Chia Hung Hou; Chih Kai Huang; Tsing Jen Chen; Shao Ze Tseng; Hung Ta Chien; Cheng Huang Kuo; Kuo Huang Hsieh; Yen Ling Tsai; Kuei Chu Hsu; Chii Chang Chen

doi:10.1143/JJAP.48.020212

Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes

Chia Hua Chan, Chia Hung Hou, Chih Kai Huang, Tsing Jen Chen, Shao Ze Tseng, Hung Ta Chien, Cheng Huang Kuo, Kuo Huang Hsieh, Yen Ling Tsai, Kuei Chu Hsu, Chii Chang Chen

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

16 引文斯高帕斯（Scopus）

摘要

In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.

原文	???core.languages.en_GB???
文章編號	020212
期刊	Japanese Journal of Applied Physics
卷	48
發行號	2
DOIs	https://doi.org/10.1143/JJAP.48.020212
出版狀態	已出版 - 2月 2009

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10.1143/JJAP.48.020212

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abstract = "In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.",

author = "Chan, {Chia Hua} and Hou, {Chia Hung} and Huang, {Chih Kai} and Chen, {Tsing Jen} and Tseng, {Shao Ze} and Chien, {Hung Ta} and Kuo, {Cheng Huang} and Hsieh, {Kuo Huang} and Tsai, {Yen Ling} and Hsu, {Kuei Chu} and Chen, {Chii Chang}",

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T1 - Patterning periodical motif on substrates using monolayer of microspheres

T2 - Application in GaN light-emitting diodes

AU - Chan, Chia Hua

AU - Hou, Chia Hung

AU - Huang, Chih Kai

AU - Chen, Tsing Jen

AU - Tseng, Shao Ze

AU - Chien, Hung Ta

AU - Kuo, Cheng Huang

AU - Hsieh, Kuo Huang

AU - Tsai, Yen Ling

AU - Hsu, Kuei Chu

AU - Chen, Chii Chang

PY - 2009/2

Y1 - 2009/2

N2 - In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.

AB - In this article, we present a method of patterning a GaN substrate using polystyrene spheres and its inversed structure as the mask. By dry etching, different surface morphologies and depths of the GaN substrate can be obtained by changing the etching time. We used such a sphere-patterned GaN substrate to fabricate GaN-based light-emitting diodes (LED). It was found that the total lighting output of the sphere-patterned GaN LED was increased by 37%.

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U2 - 10.1143/JJAP.48.020212

DO - 10.1143/JJAP.48.020212

M3 - 期刊論文

AN - SCOPUS:60849130131

SN - 0021-4922

VL - 48

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 2

M1 - 020212

ER -

Patterning periodical motif on substrates using monolayer of microspheres: Application in GaN light-emitting diodes

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