Oxygen diffusion barrier on interfacial layer formed with remote NH3 plasma treatment

Dun Bao Ruan, Kuei Shu Chang-Liao, Hsin I. Yeh, Fu Yang Chu, Kai Chun Yang, Po Chun Wu, E. Ray Hsieh

研究成果: 雜誌貢獻期刊論文同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy