Oxidative conversion of pfc via plasma processing with dielectric barrier discharges

Engineering & Materials Science

• Catalysis 42%
• Catalysts 13%
• Chemical vapor deposition 18%
• Electric potential 8%
• Experiments 5%
• Fourier transform infrared spectroscopy 19%
• Gases 36%
• Global warming 17%
• Oxygen 12%
• Plasma applications 100%
• Plasma etching 23%
• Plasmas 43%
• Semiconductor materials 13%

Physics & Astronomy

• catalysis 48%
• catalysts 19%
• gas streams 26%
• gases 32%
• global warming 31%
• high voltages 18%
• infrared spectroscopy 18%
• life (durability) 14%
• manufacturing 17%
• oxygen 12%
• plasma etching 23%
• products 27%
• vapor deposition 16%

Chemical Compounds

• Application 4%
• Catalysis 20%
• Catalyst 6%
• Chemical Vapour Deposition 14%
• Dielectric Material 55%
• Dioxygen 7%
• Etching 14%
• Fourier Transform Infrared Spectroscopy 8%
• Gas 33%
• Plasma 39%
• Residence Time 16%
• Semiconductor 12%
• Voltage 11%
• Volume 18%