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Oxidative conversion of pfc via plasma processing with dielectric barrier discharges
Sheng Jen Yu,
Moo Been Chang
環境監測技術聯合中心
土木工程學系
環境工程研究所
研究成果
:
雜誌貢獻
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期刊論文
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同行評審
61
引文 斯高帕斯（Scopus）
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深入研究「Oxidative conversion of pfc via plasma processing with dielectric barrier discharges」主題。共同形成了獨特的指紋。
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Keyphrases
Dielectric Barrier Discharge
100%
Oxidative Conversion
100%
Perfluoro Compounds
100%
Plasma Processing
100%
Plasma Catalysis
66%
Chemical Vapor Deposition
33%
Fourier Transform Infrared Spectroscopy (FT-IR)
33%
Oxygen Content
33%
Removal Efficiency
33%
Global Warming
33%
Carrier Gas
33%
COF2
33%
Innovative Approach
33%
Gas Stream
33%
Discharge Process
33%
Ppmv
33%
Semiconductor Manufacturing Process
33%
Gas Residence Time
33%
Plasma Etching
33%
Atmospheric Lifetime
33%
Laboratory-scale Experiment
33%
Plasma Chemical
33%
Engineering
Dielectrics
100%
Plasma Applications
100%
Experimental Result
33%
Chemical Vapor Deposition
33%
Vapor Deposition
33%
Oxygen Content
33%
Removal Efficiency
33%
Global Warming
33%
Manufacturing Process
33%
Carrier Gas
33%
Semiconductor Manufacturing
33%
Gas Streams
33%
Scale Experiment
33%
Atmospheric Lifetime
33%
FTIR Spectroscopy
33%
Chemical Engineering
Carbon Dioxide
100%
Vapor Deposition
100%
Chemical Vapor Deposition
100%
Plasma Process
100%
Gas Streams
100%
Gas Residence Time
100%
Physics
Dielectric Barrier Discharge
100%
Plasma Process
100%
Blood Plasma
100%
Atmospherics
33%
Global Warming
33%
Vapor Deposition
33%
Gas Streams
33%
FTIR Spectroscopy
33%
Carbon Dioxide
33%
Plasma Etching
33%
Material Science
Dielectric Material
100%
Catalysis
66%
Carbon Dioxide
33%
Chemical Vapor Deposition
33%
Fourier Transform Infrared Spectroscopy
33%
Plasma Etching
33%