Output power enhancement of light-emitting diodes via two-dimensional hole arrays generated by a monolayer of microspheres

Chia Hung Hou; Shao Ze Tseng; Chia Hua Chan; Tsing Jen Chen; Hung Ta Chien; Fu Li Hsiao; Hua Kung Chiu; Chien Chieh Lee; Yen Ling Tsai; Chii Chang Chen

doi:10.1063/1.3238360

Output power enhancement of light-emitting diodes via two-dimensional hole arrays generated by a monolayer of microspheres

Chia Hung Hou, Shao Ze Tseng, Chia Hua Chan, Tsing Jen Chen, Hung Ta Chien, Fu Li Hsiao, Hua Kung Chiu, Chien Chieh Lee, Yen Ling Tsai, Chii Chang Chen

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

30 引文斯高帕斯（Scopus）

摘要

The output power enhancement of the GaN-based light-emitting diodes (LEDs) featuring two-dimensional (2D) hole arrays is demonstrated. The 2D air hole arrays were first generated in the photoresist by utilizing the focusing nature of microspheres, and then transferred onto the GaN surface through dry etching. The maximum output power of the surface-textured LEDs was enhanced by 45% compared with the LEDs without surface texturing. The finite-difference time-domain calculation was performed and revealed that the light extraction efficiency of the textured LEDs increased with increasing etching depth.

原文	???core.languages.en_GB???
文章編號	133105
期刊	Applied Physics Letters
卷	95
發行號	13
DOIs	https://doi.org/10.1063/1.3238360
出版狀態	已出版 - 2009

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10.1063/1.3238360

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AU - Hou, Chia Hung

AU - Tseng, Shao Ze

AU - Chan, Chia Hua

AU - Chen, Tsing Jen

AU - Chien, Hung Ta

AU - Hsiao, Fu Li

AU - Chiu, Hua Kung

AU - Lee, Chien Chieh

AU - Tsai, Yen Ling

AU - Chen, Chii Chang

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AB - The output power enhancement of the GaN-based light-emitting diodes (LEDs) featuring two-dimensional (2D) hole arrays is demonstrated. The 2D air hole arrays were first generated in the photoresist by utilizing the focusing nature of microspheres, and then transferred onto the GaN surface through dry etching. The maximum output power of the surface-textured LEDs was enhanced by 45% compared with the LEDs without surface texturing. The finite-difference time-domain calculation was performed and revealed that the light extraction efficiency of the textured LEDs increased with increasing etching depth.

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Output power enhancement of light-emitting diodes via two-dimensional hole arrays generated by a monolayer of microspheres

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