Optimal use of analog and binary lithography for planar-integrated free-space optics fabrication

Keyphrases

• Lithography 100%
• Optical Fabrication 100%
• Free Space Optics 100%
• Cost Efficiency 50%
• System Parameters 50%
• Production Cost 50%
• Optical Interconnects 50%
• Reliability Cost 50%
• Free-space Optical Systems 50%

Engineering

• Lithography 100%
• Free Space 100%
• System Parameter 50%
• Optical Interconnect 50%
• Optical Systems 50%
• Experimental Work 50%
• Theoretical Work 50%

Physics

• Optical Interconnect 100%
• Space Optics 100%