@inproceedings{70aa0513724f47149352a88e65861d2f,
title = "Optical properties of transparent diamond-like carbon thin films",
abstract = "Transparent diamond-like carbon thin films were made by radio frequency magnetron sputtering with methane and hexamethyldisiloxane as gas mixtures. Transmittance could reach 90 \% with incorporation of hexamethyldisiloxane by increasing the silicon oxide structure.",
author = "Liao, \{Yan Yu\} and Liao, \{Wei Bo\} and Jaing, \{Cheng Chung\} and Chang, \{Ya Chen\} and Lee, \{Cheng Chung\} and Kuo, \{Chien Cheng\}",
note = "Publisher Copyright: {\textcopyright} OSA 2016.; Optical Interference Coatings, OIC 2016 ; Conference date: 19-06-2016 Through 24-06-2016",
year = "2016",
doi = "10.1364/oic.2016.td.10",
language = "???core.languages.en\_GB???",
isbn = "9781943580132",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Optical Interference Coatings, OIC 2016",
}