Optical properties of transparent diamond-like carbon thin films

Yan Yu Liao, Wei Bo Liao, Cheng Chung Jaing, Ya Chen Chang, Cheng Chung Lee, Chien Cheng Kuo

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

Transparent diamond-like carbon thin films were made by radio frequency magnetron sputtering with methane and hexamethyldisiloxane as gas mixtures. Transmittance could reach 90 % with incorporation of hexamethyldisiloxane by increasing the silicon oxide structure.

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主出版物標題Optical Interference Coatings, OIC 2016
發行者OSA - The Optical Society
ISBN(列印)9781943580132
DOIs
出版狀態已出版 - 2016
事件Optical Interference Coatings, OIC 2016 - Tucson, United States
持續時間: 19 6月 201624 6月 2016

出版系列

名字Optics InfoBase Conference Papers

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???event.eventtypes.event.conference???Optical Interference Coatings, OIC 2016
國家/地區United States
城市Tucson
期間19/06/1624/06/16

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