Optical NEMS based force sensor using silicon nanophotonics

Chengkuo Lee, Rohit Radhakrishnan, Chii Chang Chen, Jing Li, Narayanan Balasubramanian

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

A line defect in a silicon two-dimensional (2-D) photonic crystal (PhC) is created as a waveguide for light propagation via the PhC. By introducing micro-cavities within the line defect so as to form the resonant band gap structure for PhC, we demonstrate a PhC waveguide (PhCWG) filter with clear resonant peak in output wavelength spectrum. We conceptualized a novel nanomechanical beam structure embedded with this PhCWG filter, i.e., a NEMS (Nanoelectromechanical system) based force sensor. Since the output resonant wavelength is sensitive to the shape of air holes and defect length of the micro-cavity. Shift of the output resonant wavelength is correlated with beam deformation or force loading for this free-standing PhCWG beam. Simply speaking, the induced strain modifies the shape of air holes and the spacing among them for micro-cavities along the silicon waveguide of PhCWG. For a silicon PhCWG beam structure with dimension of 340nm(thickness) × 5μm(width) × 20μm(length), the measurable vertical deformation of 20-25 nm at the center and detectable strain of defect length of 0.004% is derived according to simulation results.

原文???core.languages.en_GB???
主出版物標題2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
頁面37-38
頁數2
DOIs
出版狀態已出版 - 2007
事件2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan
持續時間: 12 8月 200716 8月 2007

出版系列

名字2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

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???event.eventtypes.event.conference???2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
國家/地區Taiwan
城市Hualien
期間12/08/0716/08/07

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