Optical monitoring and real time admittance loci calculation through polarization interferometer

Cheng Chung Lee, Kai Wu, Sheng Hui Chen, Sheng Ju Ma

研究成果: 雜誌貢獻期刊論文同行評審

13 引文 斯高帕斯(Scopus)

摘要

A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

原文???core.languages.en_GB???
頁(從 - 到)17536-17541
頁數6
期刊Optics Express
15
發行號26
DOIs
出版狀態已出版 - 24 12月 2007

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