Optical monitoring and real time admittance loci calculation through polarization interferometer

Cheng Chung Lee; Kai Wu; Sheng Hui Chen; Sheng Ju Ma

doi:10.1364/OE.15.017536

Optical monitoring and real time admittance loci calculation through polarization interferometer

Cheng Chung Lee, Kai Wu, Sheng Hui Chen, Sheng Ju Ma

光電科學與工程學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

14 引文斯高帕斯（Scopus）

摘要

A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

原文	???core.languages.en_GB???
頁（從 - 到）	17536-17541
頁數	6
期刊	Optics Express
卷	15
發行號	26
DOIs	https://doi.org/10.1364/OE.15.017536
出版狀態	已出版 - 24 12月 2007

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10.1364/OE.15.017536

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abstract = "A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.",

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AU - Wu, Kai

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AU - Ma, Sheng Ju

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N2 - A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

AB - A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

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Optical monitoring and real time admittance loci calculation through polarization interferometer

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