摘要
The optical Integration on FR4 board with Metal semiconductor Metal (MSM) photodetector and commercial optoelectronic devices is discussed. The MSM photodetector is fabricated on InGaAs material with an absorbing layer thickness of 300 nm. The bonding pads for the MSM detectors are formed on the undercladding. The results show that the spin coating and curing of polymer waveguide results in the formation of 30 micrometre thick and 3.8 centimetre long core channel.
原文 | ???core.languages.en_GB??? |
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頁(從 - 到) | 13-14 |
頁數 | 2 |
期刊 | LEOS Summer Topical Meeting |
出版狀態 | 已出版 - 2004 |
事件 | 2004 Digest of the LEOS Summer Topical Meetings - San Diego, CA, United States 持續時間: 28 7月 2004 → 30 7月 2004 |