Optical and electric properties of aluminum-gallium doped zinc oxide for transparent conducting film

Meng Chi Li, Chien Cheng Kuo, Sheng Hui Chen, Cheng Chung Lee

研究成果: 書貢獻/報告類型會議論文篇章同行評審

2 引文 斯高帕斯(Scopus)

摘要

The well-known indium-tin-oxide is not suitable for solar cell, because of the chemical reduction, even without any hydrogen dilution. The inexpensive and non-toxic of transparent conducting Aluminum and Gallium doped ZnO (AZO and GZO) thin films have been investigated for the substitutes for the indium-tin-oxide thin films. AZO performs high transmittance at visible region, however, higher resistance than GZO. In this study, AZO and GZO composed film (GAZO) will be fabricated using DC magnetron co-sputtering deposition system to achieve lower resistance than AZO and higher transmittance than GZO. The optical and electric properties of different thickness of GAZO such as transmittance, reflection, carrier concentration, Hall mobility, and resistivity will be measured and analyzed.

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主出版物標題Thin Film Solar Technology
DOIs
出版狀態已出版 - 2009
事件Thin Film Solar Technology - San Diego, CA, United States
持續時間: 2 8月 20094 8月 2009

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
7409
ISSN(列印)0277-786X

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???event.eventtypes.event.conference???Thin Film Solar Technology
國家/地區United States
城市San Diego, CA
期間2/08/094/08/09

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