Omni-directional reflectors for deep blue LED using symmetric autocloning method

Sheng Hui Chen, Chun Ko Chen, Yu Chia Huang, Cheng Chung Lee

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)


Omni-directional reflectors (ODRs) for deep blue LED were designed and fabricated using symmetric autocloning method. The symmetric stack multi-layers for the reflectors were designed by finite-difference time-domain simulation. The fabricating process of ODR is combined with the techniques of anodic aluminum oxide (AAO) process and autocloning method. The two-dimensional structure template of nano-channel array was grown using AAO with the period of 150 nm. Then the shaping layer was deposited on the AAO template by evaporation deposition. Besides, the ion etching was applied to modify the apex angle to the triangle shape at 100°. Finally, the sub/(0. 5TiO2 SiO2 0. 5TiO2)8 multi-layer stack was deposited on the shaping layer using autocloning method to achieve the ODR. The results show the reflective spectra of ODR at the incident angles of 0, 30, 45, and 60° had high values within the range 400-450 nm. Besides, the central wavelength shifting is not obvious which is very good for keeping the color of LED stable.

頁(從 - 到)141-144
期刊Optical Review
出版狀態已出版 - 3月 2013


深入研究「Omni-directional reflectors for deep blue LED using symmetric autocloning method」主題。共同形成了獨特的指紋。