Numerical Study of Growth Rate and Purge Time in the AlN Pulsed MOCVD Process

Wei Jie Lin, Jyh Chen Chen

研究成果: 雜誌貢獻期刊論文同行評審

指紋

深入研究「Numerical Study of Growth Rate and Purge Time in the AlN Pulsed MOCVD Process」主題。共同形成了獨特的指紋。

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds