Numerical simulation of thermal and microdefect distributions effected by different types of heat shields during the Czochralski silicon crystal growth

Jyh Chen Chen, Farn Shiun Hwu, Bing Jung Chen

研究成果: 雜誌貢獻期刊論文同行評審

指紋

深入研究「Numerical simulation of thermal and microdefect distributions effected by different types of heat shields during the Czochralski silicon crystal growth」主題。共同形成了獨特的指紋。

Engineering & Materials Science