Numerical simulation of heat and mass transfer during Czochralski silicon crystal growth under the application of crystal-crucible counter- and iso-rotations

Thi Hoai Thu Nguyen, Jyh Chen Chen, Chieh Hu, Chun Hung Chen

研究成果: 雜誌貢獻期刊論文同行評審

23 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Material Science