@inproceedings{c2c7840856ee4746af367b5f47febd61,
title = "Novel structure of controllable of photonic mirror fabricated by atomic layer deposition on nanosphere template",
abstract = "In this paper, a novel structure of controllable of photonic mirror (NSM) has been fabricated by atomic layer deposition (ALD) coating technique on a polystyrene (PS) nanosphere template. A 30nm ALD Al2O3 film was coated on the reduced PS nanopshere, the removal of PS nanosphere was burned in atmosphere at 300°C to form the Al2O3 hollow nanosphere, and then a 80nm indium tin oxide (ITO) film was sputtered on the hollow nanosphere as a top electrode. The results show that the application of NSM can control the reflectance with a tiny value of 0.003% per 0.1V of bias treatment.",
author = "Chan, {Shih Hao} and Lin, {Wei Tin} and Cho, {Wen Hao} and Kuo, {Chien Cheng} and Lee, {Cheng Chung} and Chen, {Sheng Hui}",
year = "2013",
language = "???core.languages.en_GB???",
isbn = "9781557529701",
series = "Optics InfoBase Conference Papers",
booktitle = "Optical Interference Coatings, OIC 2013",
note = "Optical Interference Coatings, OIC 2013 ; Conference date: 16-06-2013 Through 21-06-2013",
}