Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

Jim Wei Wu, Jui Tse Weng, Ting Kuei Hsu, Shao An Chao, Bo Hao Chen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)

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