@inproceedings{b369eb927e2b40739cae15182ed27c7e,
title = "Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory",
abstract = "The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.",
keywords = "atomic force microscopy, long short-term memory, model predictive control, Piezoelectric stage, spiral trajectory",
author = "Wu, {Jim Wei} and Weng, {Jui Tse} and Hsu, {Ting Kuei} and Chao, {Shao An} and Chen, {Bo Hao}",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 International Automatic Control Conference, CACS 2022 ; Conference date: 03-11-2022 Through 06-11-2022",
year = "2022",
doi = "10.1109/CACS55319.2022.9969847",
language = "???core.languages.en_GB???",
series = "2022 International Automatic Control Conference, CACS 2022",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 International Automatic Control Conference, CACS 2022",
}