Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

Jim Wei Wu; Jui Tse Weng; Ting Kuei Hsu; Shao An Chao; Bo Hao Chen

doi:10.1109/CACS55319.2022.9969847

Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

Jim Wei Wu, Jui Tse Weng, Ting Kuei Hsu, Shao An Chao, Bo Hao Chen

電機工程學系

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

1 引文斯高帕斯（Scopus）

摘要

The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.

原文	???core.languages.en_GB???
主出版物標題	2022 International Automatic Control Conference, CACS 2022
發行者	Institute of Electrical and Electronics Engineers Inc.
ISBN（電子）	9781665496469
DOIs	https://doi.org/10.1109/CACS55319.2022.9969847
出版狀態	已出版 - 2022
事件	2022 International Automatic Control Conference, CACS 2022 - Kaohsiung, Taiwan 持續時間: 3 11月 2022 → 6 11月 2022

出版系列

名字	2022 International Automatic Control Conference, CACS 2022

???event.eventtypes.event.conference???

???event.eventtypes.event.conference???	2022 International Automatic Control Conference, CACS 2022
國家/地區	Taiwan
城市	Kaohsiung
期間	3/11/22 → 6/11/22

存取文件

10.1109/CACS55319.2022.9969847

AFR演算法開發與應用計畫
Wu, J.-W. . (PI)
1/06/22 → 31/05/23
研究計畫: Research

引用此

Wu, J. W., Weng, J. T., Hsu, T. K., Chao, S. A., & Chen, B. H. (2022). Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. 於 2022 International Automatic Control Conference, CACS 2022 (2022 International Automatic Control Conference, CACS 2022). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CACS55319.2022.9969847

@inproceedings{b369eb927e2b40739cae15182ed27c7e,

title = "Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory",

abstract = "The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.",

keywords = "Piezoelectric stage, atomic force microscopy, long short-term memory, model predictive control, spiral trajectory",

author = "Wu, {Jim Wei} and Weng, {Jui Tse} and Hsu, {Ting Kuei} and Chao, {Shao An} and Chen, {Bo Hao}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 International Automatic Control Conference, CACS 2022 ; Conference date: 03-11-2022 Through 06-11-2022",

year = "2022",

doi = "10.1109/CACS55319.2022.9969847",

language = "???core.languages.en_GB???",

series = "2022 International Automatic Control Conference, CACS 2022",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2022 International Automatic Control Conference, CACS 2022",

}

Wu, JW, Weng, JT, Hsu, TK, Chao, SA & Chen, BH 2022, Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. 於 2022 International Automatic Control Conference, CACS 2022. 2022 International Automatic Control Conference, CACS 2022, Institute of Electrical and Electronics Engineers Inc., 2022 International Automatic Control Conference, CACS 2022, Kaohsiung, Taiwan, 3/11/22. https://doi.org/10.1109/CACS55319.2022.9969847

Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. / Wu, Jim Wei; Weng, Jui Tse; Hsu, Ting Kuei 等.
2022 International Automatic Control Conference, CACS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. (2022 International Automatic Control Conference, CACS 2022).

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

TY - GEN

T1 - Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

AU - Wu, Jim Wei

AU - Weng, Jui Tse

AU - Hsu, Ting Kuei

AU - Chao, Shao An

AU - Chen, Bo Hao

PY - 2022

Y1 - 2022

N2 - The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.

AB - The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.

KW - Piezoelectric stage

KW - atomic force microscopy

KW - long short-term memory

KW - model predictive control

KW - spiral trajectory

UR - http://www.scopus.com/inward/record.url?scp=85144621136&partnerID=8YFLogxK

U2 - 10.1109/CACS55319.2022.9969847

DO - 10.1109/CACS55319.2022.9969847

M3 - 會議論文篇章

AN - SCOPUS:85144621136

T3 - 2022 International Automatic Control Conference, CACS 2022

BT - 2022 International Automatic Control Conference, CACS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2022 International Automatic Control Conference, CACS 2022

Y2 - 3 November 2022 through 6 November 2022

ER -

Wu JW, Weng JT, Hsu TK, Chao SA, Chen BH. Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. 於 2022 International Automatic Control Conference, CACS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. (2022 International Automatic Control Conference, CACS 2022). doi: 10.1109/CACS55319.2022.9969847

Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

摘要

出版系列

???event.eventtypes.event.conference???

存取文件

指紋

專案

AFR演算法開發與應用計畫

引用此