New observations on the physical mechanism of Vth-variation in nanoscale CMOS devices after long term stress

E. R. Hsieh, Steve S. Chung, C. H. Tsai, R. M. Huang, C. T. Tsai, C. W. Liang

研究成果: 書貢獻/報告類型會議論文篇章同行評審

12 引文 斯高帕斯(Scopus)

摘要

A new effect, called random trap fluctuation(RTF), is proposed to study the impact of hot carrier stress on the device variability. It was found that not only the popular random dopant fluctuation (RDF), but also the traps, caused by the HC stress or FN-stress, induce the Vth variation. After the FN stress, it was found that Vth variation is worse in pMOSFETs due to stress-induced interface traps. While, under the HC stress, different V th variations were found for nMOSFETs and pMOSFETs. The V th variation is enhanced in pMOSFETs due to RTF and reduced in nMOSFET as a result of the Trap Blocking Effect (TBE). RTF in pMOSFET might be the dominant factor of CMOS reliability for future generations.

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主出版物標題2011 International Reliability Physics Symposium, IRPS 2011
頁面XT.9.1-XT.9.2
DOIs
出版狀態已出版 - 2011
事件49th International Reliability Physics Symposium, IRPS 2011 - Monterey, CA, United States
持續時間: 10 4月 201114 4月 2011

出版系列

名字IEEE International Reliability Physics Symposium Proceedings
ISSN(列印)1541-7026

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???event.eventtypes.event.conference???49th International Reliability Physics Symposium, IRPS 2011
國家/地區United States
城市Monterey, CA
期間10/04/1114/04/11

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