@inproceedings{5512dcb098e548b087c07eb5e2291fc8,
title = "Nb-doped TiO2 transparent conducting coating by pulse DC magnetron co-sputtering",
abstract = "Nb doped TiO2 (TNO) is a promising transparent conducting oxide suitable for many applications such as in solar cells, OLEDs, LEDs, FPDs, touch panels, etc. TNO thin film was deposited on an unheated glass substrate by pulsed direct current (DC) magnetron co-sputtering. After annealing in a vacuum (<9×10-6 Torr) at 370°C for 10 minutes, the film crystallized into a polycrystalline anatase TiO2 structure, the resistivity decreased to 4.5×10-4 ω-cm and the average transmittance increased to above 70% in the visible light region. The influence of annealing on the TNO amorphous-to-anatase phase transition, decrease in the resistivity and increase in the average transmittance will be discussed.",
keywords = "Annealing, Magnetron co-sputtering, Transparent conducting oxide",
author = "Peng, {Ssu Hsiang} and Kuo, {Chien Cheng} and Li, {Meng Chi} and Tsai, {Shu Hui} and Lee, {Cheng Chung}",
year = "2010",
doi = "10.1117/12.860483",
language = "???core.languages.en_GB???",
isbn = "9780819482822",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI",
note = "Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI ; Conference date: 01-08-2010 Through 03-08-2010",
}