Nanothick layer transfer of hydrogen-implanted wafer using polysilicon sacrificial layer

Keyphrases

• Wafer 100%
• Polysilicon 100%
• Layer Transfer 100%
• Sacrificial Layer 100%
• Silicon Layer 40%
• Silicon Wafer 20%
• Fabrication Methods 20%
• Transmission Electron Microscopy 20%
• Wet Etching 20%
• Etching Process 20%
• Nanostructured Materials 20%
• Ion Implantation 20%
• Hydrogen-rich 20%
• Microwave Irradiation 20%
• SOI Material 20%
• Oxidized Surface 20%
• Implantation Depth 20%
• Buried Layer 20%
• Thinning Process 20%
• 2D Nanostructures 20%

Material Science

• Silicon 100%
• Surface (Surface Science) 100%
• Silicon Wafer 50%
• Transmission Electron Microscopy 50%
• Wet Etching 50%
• Ion Implantation 50%
• Nanostructure 50%

Engineering

• Polysilicon 100%
• Silicon Layer 50%
• Silicon Wafer 25%
• Fabrication Method 25%
• Nanomaterial 25%
• Ion Implantation 25%
• Implant 25%
• Thinning Process 25%