Nanostructures on epitaxial SiGe films on silicon

L. J. Chen; W. W. Wu; S. W. Lee; H. C. Chen; T. H. Yang

Nanostructures on epitaxial SiGe films on silicon

L. J. Chen, W. W. Wu, S. W. Lee, H. C. Chen, T. H. Yang

材料科學與工程研究所

研究成果: 會議貢獻類型 › 會議論文 › 同行評審

1 引文斯高帕斯（Scopus）

摘要

Nanodots and nano-rings are basic building blocks of nanostructures. Si_1-xGe_x heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.

原文	???core.languages.en_GB???
頁面	241-252
頁數	12
出版狀態	已出版 - 2004
事件	State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium - San Antonio, TX, United States 持續時間: 9 5月 2004 → 14 5月 2004

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???event.eventtypes.event.conference???	State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium
國家/地區	United States
城市	San Antonio, TX
期間	9/05/04 → 14/05/04

引用此

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title = "Nanostructures on epitaxial SiGe films on silicon",

abstract = "Nanodots and nano-rings are basic building blocks of nanostructures. Si1-xGex heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.",

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pages = "241--252",

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Nanostructures on epitaxial SiGe films on silicon. / Chen, L. J.; Wu, W. W.; Lee, S. W. 等.
2004. 241-252 論文發表於 State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium, San Antonio, TX, United States.

研究成果: 會議貢獻類型 › 會議論文 › 同行評審

TY - CONF

T1 - Nanostructures on epitaxial SiGe films on silicon

AU - Chen, L. J.

AU - Wu, W. W.

AU - Lee, S. W.

AU - Chen, H. C.

AU - Yang, T. H.

PY - 2004

Y1 - 2004

N2 - Nanodots and nano-rings are basic building blocks of nanostructures. Si1-xGex heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.

AB - Nanodots and nano-rings are basic building blocks of nanostructures. Si1-xGex heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.

UR - http://www.scopus.com/inward/record.url?scp=5744243355&partnerID=8YFLogxK

M3 - 會議論文

AN - SCOPUS:5744243355

SP - 241

EP - 252

T2 - State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium

Y2 - 9 May 2004 through 14 May 2004

ER -

Nanostructures on epitaxial SiGe films on silicon

摘要

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