Nanophotonics based cantilever sensor

Chengkuo Lee, Jayaraj Thillaigovindan, Chii Chang Chen, Xian Tong Chen, Ya Ting Chao, Shaohua Tao, Wenfeng Xiang, Aibin Yu, Hanhua Feng, G. Q. Lo

研究成果: 書貢獻/報告類型會議論文篇章同行評審


We present design and simulation results of a novel nanomechanical sensor using a silicon cantilever comprising two-dimensional (2-D) photonic crystal (PC) microcavity resonator structure. A U-shaped silicon line defect in a 2-D photonic crystal is considered as a waveguide for confining light propagation within waveguide, while two-hole pairs are placed along this silicon waveguide as a optical reflector. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the microcavity resonator. The minimum detectable strain, vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94(j.m and 0.046 jiN for 50(xm cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.

主出版物標題2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008
出版狀態已出版 - 2008
事件2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008 - Singapore, Singapore
持續時間: 8 12月 200811 12月 2008


名字2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008


???event.eventtypes.event.conference???2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008


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