Nanomechanical properties of AlN(1 0 3) thin films by nanoindentation

Sheng Rui Jian, Guo Ju Chen, Jason S.C. Jang, Yi Shao Lai

研究成果: 雜誌貢獻期刊論文同行評審

24 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds