Multi-cantilever-driven rotational micrograting for MOEMS spectrometer

Joe F. Lo, Shih Jui Chen, Hongyu Yu, Derrick Chi, Chuang Yuan Lee, Laura Marcu, Eun Sok Kim, Martin Gundersen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

4 引文 斯高帕斯(Scopus)

摘要

For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.

原文???core.languages.en_GB???
主出版物標題TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
頁面2421-2424
頁數4
DOIs
出版狀態已出版 - 2007
事件4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
持續時間: 10 6月 200714 6月 2007

出版系列

名字TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

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???event.eventtypes.event.conference???4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
國家/地區France
城市Lyon
期間10/06/0714/06/07

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