@inproceedings{6441c0cbe9d849779a1d1869c5538b3a,
title = "Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface",
abstract = "The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system integrated with aforementioned AFM. Experimental results show the stage is featured with large scanning distance, fast imaging and maximum 20 nm positioning error resolution.",
keywords = "Controlled system, Mg-Al spinel nanocrystal, Piezoelectric motion stage, Scanning-by-probe atomic force microscopy",
author = "Huang, {Yi Cheng} and Lin, {Mou Sheng} and Liu, {Che Ming} and Chen, {Jyh Chen}",
year = "2004",
language = "???core.languages.en_GB???",
isbn = "0780387481",
series = "Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation",
pages = "793--798",
booktitle = "Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation",
note = "Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation ; Conference date: 26-08-2004 Through 31-08-2004",
}