Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang; Mou Sheng Lin; Che Ming Liu; Jyh Chen Chen

Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang, Mou Sheng Lin, Che Ming Liu, Jyh Chen Chen

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

1 引文斯高帕斯（Scopus）

摘要

The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.

原文	???core.languages.en_GB???
頁（從 - 到）	257-265
頁數	9
期刊	Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
卷	25
發行號	3
出版狀態	已出版 - 6月 2004

引用此

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title = "Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface",

abstract = "The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.",

keywords = "Mg-Al spinel nanocrystal, Piezoelectric motion stage, Scanning-by-probe atomic force microscopy",

author = "Huang, {Yi Cheng} and Lin, {Mou Sheng} and Liu, {Che Ming} and Chen, {Jyh Chen}",

year = "2004",

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volume = "25",

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journal = "Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao",

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Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface. / Huang, Yi Cheng; Lin, Mou Sheng; Liu, Che Ming 等.
於: Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao, 卷 25, 編號 3, 06.2004, p. 257-265.

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

TY - JOUR

T1 - Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

AU - Huang, Yi Cheng

AU - Lin, Mou Sheng

AU - Liu, Che Ming

AU - Chen, Jyh Chen

PY - 2004/6

Y1 - 2004/6

N2 - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.

AB - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.

KW - Mg-Al spinel nanocrystal

KW - Piezoelectric motion stage

KW - Scanning-by-probe atomic force microscopy

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M3 - 期刊論文

AN - SCOPUS:12344255028

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JO - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

JF - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

IS - 3

ER -

Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

摘要

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引用此