Monolithic low sideband guided-mode resonance filter based on two-layer structure

Keyphrases

• Bulk Micromachining Technology 50%
• Bulk Silicon Micromachining 50%
• Design Considerations 50%
• Fabrication Methods 50%
• Filter Method 100%
• Guided-mode Resonance 50%
• Guided-mode Resonance Filter 100%
• High Efficiency 50%
• Integrated Microsystem 50%
• Optical Filters 50%
• Optoelectronic Elements 50%
• Sidebands 100%
• Silicon Nitride 50%
• SiNx 50%
• Spectral Response 50%
• Two-layer Structure 100%

Engineering

• Bulk Silicon 50%
• Design Consideration 50%
• Guided Mode 100%
• Layer Structure 100%
• Micro Machining 50%
• Microsystem 50%
• Nitride 50%
• Optical Filter 50%
• Optoelectronics 50%
• Sidebands 100%
• Spectral Response 50%