Monolithic low sideband guided-mode resonance filter based on two-layer structure

Che Lung Hsu; Yu Hong Chou; Chih Ming Wang; Jenq Yang Chang; Chien Chieh Lee

doi:10.1117/12.616749

Monolithic low sideband guided-mode resonance filter based on two-layer structure

Che Lung Hsu, Yu Hong Chou, Chih Ming Wang, Jenq Yang Chang, Chien Chieh Lee

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

摘要

In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiN_x) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

原文	???core.languages.en_GB???
文章編號	593116
頁（從 - 到）	1-8
頁數	8
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	5931
DOIs	https://doi.org/10.1117/12.616749
出版狀態	已出版 - 2005
事件	Nanoengineering: Fabrication, Properties, Optics, and Devices II - San Diego, CA, United States 持續時間: 3 8月 2005 → 4 8月 2005

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10.1117/12.616749

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title = "Monolithic low sideband guided-mode resonance filter based on two-layer structure",

abstract = "In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.",

keywords = "Guided-mode resonance, Resonant grating, Si bulk micromachining",

author = "Hsu, {Che Lung} and Chou, {Yu Hong} and Wang, {Chih Ming} and Chang, {Jenq Yang} and Lee, {Chien Chieh}",

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T1 - Monolithic low sideband guided-mode resonance filter based on two-layer structure

AU - Hsu, Che Lung

AU - Chou, Yu Hong

AU - Wang, Chih Ming

AU - Chang, Jenq Yang

AU - Lee, Chien Chieh

PY - 2005

Y1 - 2005

N2 - In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

AB - In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

KW - Guided-mode resonance

KW - Resonant grating

KW - Si bulk micromachining

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U2 - 10.1117/12.616749

DO - 10.1117/12.616749

M3 - 會議論文

AN - SCOPUS:31744438139

SN - 0277-786X

VL - 5931

SP - 1

EP - 8

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 593116

T2 - Nanoengineering: Fabrication, Properties, Optics, and Devices II

Y2 - 3 August 2005 through 4 August 2005

ER -

Monolithic low sideband guided-mode resonance filter based on two-layer structure

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