Modelling of nitrogen plasma parameters in a ferro-electric packed bed barrier discharge

K. Takaki, M. B. Chang, T. Kawasaki, T. Ohkubo, S. Kanazawa, T. Nomoto, J. S. Chang

研究成果: 雜誌貢獻期刊論文同行評審

1 引文 斯高帕斯(Scopus)

摘要

The effect of pellets dielectric constants, applied voltage and operating frequencies on plasma parameters in a ferroelectric packed bed barrier discharge was studied. Pure nitrogen plasma was used to develop a chemical kinetic model for prediction of ion and radical species. The electron density was found to increase with increase in applied voltage, dielectric constant and applied voltage frequency. Analysis suggested that metastable nitrogen was produced by recombination of ions while radical atoms were generated by direct electron impact processes.

原文???core.languages.en_GB???
文章編號84
頁(從 - 到)373-376
頁數4
期刊Conference on Electrical Insulation and Dielectric Phenomena (CEIDP), Annual Report
DOIs
出版狀態已出版 - 2001

指紋

深入研究「Modelling of nitrogen plasma parameters in a ferro-electric packed bed barrier discharge」主題。共同形成了獨特的指紋。

引用此