Micropolarizer fabricated from CaCO3by anisotropic wet etching

Yu Chi Chang, Hao Ting Tien, Chung Dau Sung, Chien Chieh Lee, Chih Ming Wang, Jenq Yang Chang

研究成果: 雜誌貢獻期刊論文同行評審


A micropolarizer is fabricated on a birefringent crystal, calcite, by anisotropic wet etching. This device consists of a v-groove grating on calcite, covered by an index-matching material. The grating is fabricated by acid wet etching. When its acid concentration and stirring speed are altered, the etching mechanism can be controlled within the surface-reaction regime. This results in anisotropic etching, which produces a v-groove grating on a calcite surface. This v-groove grating can be fabricated to have a period as small as 2 μm. To the best of our knowledge, this type of v-groove calcite grating is reported for the first time. Although the transmission efficiency of this device is wavelength dependent, a broadband micropolarizer can be made by gluing together two devices with periods of 12 and 16 μm.

頁(從 - 到)4423-4426
期刊Applied Optics
出版狀態已出版 - 1 8月 2003


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