Microoptical element on SiN membrane

J. Y. Chang; Y. C. Chang; C. C. Lee; C. M. Wang

doi:10.1117/12.504415

Microoptical element on SiN membrane

J. Y. Chang, Y. C. Chang, C. C. Lee, C. M. Wang

研究成果: 雜誌貢獻 › 會議論文 › 同行評審

2 引文斯高帕斯（Scopus）

摘要

Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

原文	???core.languages.en_GB???
頁（從 - 到）	61-70
頁數	10
期刊	Proceedings of SPIE - The International Society for Optical Engineering
卷	5183
DOIs	https://doi.org/10.1117/12.504415
出版狀態	已出版 - 2003
事件	Lithographic and Micromachining Techniques for Optical Component Fabrication II - San Diego, CA, United States 持續時間: 3 8月 2003 → 4 8月 2003

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10.1117/12.504415

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@article{023f4053da2b4acc98915ee1de1fa9cc,

title = "Microoptical element on SiN membrane",

abstract = "Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.",

keywords = "Anisotropic etching, Grating, Microoptics, SiN film",

author = "Chang, {J. Y.} and Chang, {Y. C.} and Lee, {C. C.} and Wang, {C. M.}",

year = "2003",

doi = "10.1117/12.504415",

language = "???core.languages.en_GB???",

volume = "5183",

pages = "61--70",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Lithographic and Micromachining Techniques for Optical Component Fabrication II ; Conference date: 03-08-2003 Through 04-08-2003",

}

TY - JOUR

T1 - Microoptical element on SiN membrane

AU - Chang, J. Y.

AU - Chang, Y. C.

AU - Lee, C. C.

AU - Wang, C. M.

PY - 2003

Y1 - 2003

N2 - Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

AB - Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

KW - Anisotropic etching

KW - Grating

KW - Microoptics

KW - SiN film

UR - http://www.scopus.com/inward/record.url?scp=2342630012&partnerID=8YFLogxK

U2 - 10.1117/12.504415

DO - 10.1117/12.504415

M3 - 會議論文

AN - SCOPUS:2342630012

SN - 0277-786X

VL - 5183

SP - 61

EP - 70

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Lithographic and Micromachining Techniques for Optical Component Fabrication II

Y2 - 3 August 2003 through 4 August 2003

ER -

Microoptical element on SiN membrane

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