Microfabricated chemical sensors for safety and emission control applications

Gary W. Hunter; Philip G. Neudeck; Liang Yu Chen; Dak Knight; C. C. Liu; Q. H. Wu

Microfabricated chemical sensors for safety and emission control applications

Gary W. Hunter, Philip G. Neudeck, Liang Yu Chen, Dak Knight, C. C. Liu, Q. H. Wu

材料科學與工程研究所

研究成果: 會議貢獻類型 › 會議論文 › 同行評審

6 引文斯高帕斯（Scopus）

摘要

Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

原文	???core.languages.en_GB???
頁面	D11-1-D11-8
出版狀態	已出版 - 1998
事件	Proceedings of the 1998 17th AIAA/IEEE/SAE Digital Avionics Systems Conference, DASC. Part 1 (of 2) - Bellevue, WA, USA 持續時間: 31 10月 1998 → 7 11月 1998

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???event.eventtypes.event.conference???	Proceedings of the 1998 17th AIAA/IEEE/SAE Digital Avionics Systems Conference, DASC. Part 1 (of 2)
城市	Bellevue, WA, USA
期間	31/10/98 → 7/11/98

引用此

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abstract = "Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.",

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TY - CONF

T1 - Microfabricated chemical sensors for safety and emission control applications

AU - Hunter, Gary W.

AU - Neudeck, Philip G.

AU - Chen, Liang Yu

AU - Knight, Dak

AU - Liu, C. C.

AU - Wu, Q. H.

PY - 1998

Y1 - 1998

N2 - Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

AB - Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

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M3 - 會議論文

AN - SCOPUS:0032299094

SP - D11-1-D11-8

T2 - Proceedings of the 1998 17th AIAA/IEEE/SAE Digital Avionics Systems Conference, DASC. Part 1 (of 2)

Y2 - 31 October 1998 through 7 November 1998

ER -

Microfabricated chemical sensors for safety and emission control applications

摘要

???event.eventtypes.event.conference???

指紋

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