@inproceedings{6a949f5e55b44c23ae122423c30ea08c,
title = "Micro-Anode Guided Electroplating (MAGE) control system with digital imaging enhancement",
abstract = "This article releases the details of the digital imaging enhancement for the micro-anode guided electroplating MAGE fabrication equipment. The control system architecture, the micro stepping architecture, the electroplating power source, the measurement system, the man machine interface, the control procedure and the digital imaging subsystem are described. The profile of the electroplating deposit during the initiation phase as monitored in real-time by the new imaging subsystem could verify the simulation prediction.",
author = "Jiang, {S. B.} and Lee, {D. L.} and Yeh, {Z. L.} and Kao, {P. F.}",
year = "2006",
doi = "10.1109/ICSMC.2006.384615",
language = "???core.languages.en_GB???",
isbn = "1424401003",
series = "Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "3233--3236",
booktitle = "2006 IEEE International Conference on Systems, Man and Cybernetics",
note = "2006 IEEE International Conference on Systems, Man and Cybernetics ; Conference date: 08-10-2006 Through 11-10-2006",
}