@inproceedings{1ee1076b8c4340dda7eba03ad40131f8,
title = "Micro-anode Guided Electroplating (MAGE) control system",
abstract = "This article releases the details of the equipment development for the micro-anode guided electroplating MAGE fabrication. The microstepping architecture, electroplating power source, control system architecture, measurement system, man machine interface and the control prodedure will be described. Metallic columns around 100 micrometers in diameter were fabricated up to 2cm long with this equipment to demonstrate its performance. An innovative intermittent MAGE mode is supported by this equipment so that it can produce micro columns of finer surface morphology and better circumferential uniformity than the conventional continuous electroplating.",
keywords = "3D micro-structure, Localized electro-deposition, MAGE, Micro-anode guided electroplating, Micro-fabrication",
author = "Lee, {D. L.} and Lin, {J. C.} and Kao, {P. F.} and Jiang, {S. B.}",
year = "2006",
doi = "10.4028/0-87849-990-3.115",
language = "???core.languages.en_GB???",
isbn = "0878499903",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
number = "PART 1",
pages = "115--120",
booktitle = "Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture",
edition = "PART 1",
note = "2005 International Conference on Advanced Manufacture, ICAM2005 ; Conference date: 28-11-2005 Through 02-12-2005",
}