Metal-oxide-HEMT On 6.1Å antimonides

Da Wei Fan, Yu Chao Lin, Heng Kuang Lin, Pei Chin Chiu, Shu Han Chen, Jen Inn Chyi, Chih Hsin Ko, Ta Ming Kuan, Meng Kuei Hsieh, Wen Chin Lee, Clement H. Wann

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)

摘要

We successfully demonstrated DC and RF performance of a metal-oxide-HEMT based on baseline InAs/AlSb HEMT epitaxy material. E-beam evaporated Al 1-xOx was chosen for the dielectric film and its composition characterized by EDS. In a device with 2.0μm gate length, maximum drain current is 286mA/mm and peak transconductance is 495mS/mm at drain voltage of 0.4V. Microwave performance shows a fT of 10 GHz and an fmax of 20 GHz. Degraded subthreshold slope but suppressed gate leakage specifically at large electric field were observed.

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主出版物標題IEEE International Conference on Indium Phosphide and Related Materials, IPRM 2009
頁面326-329
頁數4
DOIs
出版狀態已出版 - 2009
事件IEEE International Conference on Indium Phosphide and Related Materials, IPRM 2009 - Newport Beach, CA, United States
持續時間: 10 5月 200914 5月 2009

出版系列

名字Conference Proceedings - International Conference on Indium Phosphide and Related Materials
ISSN(列印)1092-8669

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???event.eventtypes.event.conference???IEEE International Conference on Indium Phosphide and Related Materials, IPRM 2009
國家/地區United States
城市Newport Beach, CA
期間10/05/0914/05/09

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