MEMS ultrasonic transducers for highly sensitive Doppler velocity sensor for low velocity measurement

Lingtao Wang, Youngki Choe, Shih Jui Chen, Lukas Baumgartel, Eun Sok Kim

研究成果: 書貢獻/報告類型會議論文篇章同行評審

1 引文 斯高帕斯(Scopus)

摘要

This paper describes a novel, highly-sensitive ultrasonic Doppler velocity sensing system for low velocity measurement in portable navigation systems. It is a compact velocity sensing system, in which MEMS ultrasonic transducers are incorporated with phase-locked-loop (PLL) circuitry for frequency detection and signal processing. The achieved voltage-velocity sensitivity is 0.22 V/(mm/s) and the minimum detectable velocity is 0.67 mm/s, corresponding to 0.11 Hz in Doppler frequency. To the best of our knowledge, the minimum detectable velocity is the best reported in literature. Also, the output of the PLL is a DC voltage linearly related to the velocity, and there is no need to convert the frequency shift to analog voltage.

原文???core.languages.en_GB???
主出版物標題2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
頁面719-722
頁數4
DOIs
出版狀態已出版 - 2011
事件2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
持續時間: 5 6月 20119 6月 2011

出版系列

名字2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

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???event.eventtypes.event.conference???2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
國家/地區China
城市Beijing
期間5/06/119/06/11

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