Measurements of the effective optical constants and the flying-height of read-write sliders by heterodyne interferometry

Ju Yi Lee, Der Chin Su, Cheng Chih Hsu

研究成果: 雜誌貢獻會議論文同行評審

摘要

A new method for measuring the effective optical constants and the flying-heights with only an optical set-up by using the heterodyne interferometry is proposed. At first, a set of special equations for describing the relations among the phase differences of s-polarization with respect to p-polarization, the effective optical constants, and the flying-heights, are derived from the Fresnel's equations and the effects of multi-beam interferences. And the effective optical constants can be obtained from the conditions for the extreme points, which can be accurately determined with a heterodyne interferometer. Substituting the optical constants into the special equations which we derived previously, the flying-heights can be estimated.

原文???core.languages.en_GB???
頁(從 - 到)40-43
頁數4
期刊Proceedings of SPIE - The International Society for Optical Engineering
3740
出版狀態已出版 - 1999
事件Proceedings of the 1999 Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - Yokohama, Jpn
持續時間: 16 6月 199918 6月 1999

指紋

深入研究「Measurements of the effective optical constants and the flying-height of read-write sliders by heterodyne interferometry」主題。共同形成了獨特的指紋。

引用此