TY - JOUR
T1 - Measurements of the effective optical constants and the flying-height of read-write sliders by heterodyne interferometry
AU - Lee, Ju Yi
AU - Su, Der Chin
AU - Hsu, Cheng Chih
PY - 1999
Y1 - 1999
N2 - A new method for measuring the effective optical constants and the flying-heights with only an optical set-up by using the heterodyne interferometry is proposed. At first, a set of special equations for describing the relations among the phase differences of s-polarization with respect to p-polarization, the effective optical constants, and the flying-heights, are derived from the Fresnel's equations and the effects of multi-beam interferences. And the effective optical constants can be obtained from the conditions for the extreme points, which can be accurately determined with a heterodyne interferometer. Substituting the optical constants into the special equations which we derived previously, the flying-heights can be estimated.
AB - A new method for measuring the effective optical constants and the flying-heights with only an optical set-up by using the heterodyne interferometry is proposed. At first, a set of special equations for describing the relations among the phase differences of s-polarization with respect to p-polarization, the effective optical constants, and the flying-heights, are derived from the Fresnel's equations and the effects of multi-beam interferences. And the effective optical constants can be obtained from the conditions for the extreme points, which can be accurately determined with a heterodyne interferometer. Substituting the optical constants into the special equations which we derived previously, the flying-heights can be estimated.
UR - http://www.scopus.com/inward/record.url?scp=0032597084&partnerID=8YFLogxK
M3 - 會議論文
AN - SCOPUS:0032597084
SN - 0277-786X
VL - 3740
SP - 40
EP - 43
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
T2 - Proceedings of the 1999 Optical Engineering for Sensing and Nanotechnology (ICOSN '99)
Y2 - 16 June 1999 through 18 June 1999
ER -