Measurement of in-plane displacement by wavelength-modulated heterodyne speckle interferometry

Ju Yi Lee, Ming Pei Lu, Kun Yi Lin, Szu Han Huang

研究成果: 雜誌貢獻期刊論文同行評審

10 引文 斯高帕斯(Scopus)

摘要

The use of wavelength-modulated light incorporated into an optical-path-difference speckle interferometer is demonstrated as a heterodyne technique for measuring the in-plane displacement of a rough object. The in-plane displacement can be determined from the measured phase variation of the heterodyne speckle signal.We also improved the optical configuration to create a high-contrast interference pattern. Experimental results reveal that the proposed method can detect displacement up to a long range of 220 μm and displacement variation down to the nanometer range. Moreover, the sensitivity can reach up to 0.8°/nm. The performance of the system is discussed.

原文???core.languages.en_GB???
頁(從 - 到)1095-1100
頁數6
期刊Applied Optics
51
發行號8
DOIs
出版狀態已出版 - 10 3月 2012

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