Measurement improvement by high overlapping density subaperture stitching interferometry

Hung Sheng Chang, Chao Wen Liang, Po Chih Lin, Yi Chun Chen

研究成果: 雜誌貢獻期刊論文同行評審

5 引文 斯高帕斯(Scopus)

摘要

The vibration-modulated subaperture stitching interferometer acquires the interferogram on the fly dynamically. With its highly improved measurement throughput, we applied the device for high overlapping density subaperture stitching interferometry to acquire hundreds of overlapping subapertures in a single phase stitching measurement. The averaging effect of the high overlapping density stitching interferometer is discussed. In the experiment, the proposed high overlapping density stitching interferometer is also proved to reduce measurement uncertainty and improve measurement quality effectively.

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頁(從 - 到)H102-H108
期刊Applied Optics
53
發行號29
DOIs
出版狀態已出版 - 10 10月 2014

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