@conference{81908beed732494ca3ca316f8925303f,
title = "MAGNETRON ENHANCED REACTIVE ION ETCHING OF SiO//2 AND Si.",
author = "I. Lin and Hinson, {D. C.} and Class, {W. H.} and Sandstrom, {R. L.} and F. Pasierb",
year = "1983",
language = "???core.languages.en_GB???",
pages = "132--142",
}