I. Lin, D. Hinson, W. Class, R. Sandstron
研究成果: 雜誌貢獻 › 會議論文 › 同行評審
}
TY - JOUR
T1 - MAGNETRON ENHANCED REACTIVE ION ETCHING OF SiO//2.
AU - Lin, I.
AU - Hinson, D.
AU - Class, W.
AU - Sandstron, R.
PY - 1983
Y1 - 1983
UR - http://www.scopus.com/inward/record.url?scp=0021005877&partnerID=8YFLogxK
M3 - 會議論文
AN - SCOPUS:0021005877
SN - 0160-4619
VL - 83-1
SP - 254
EP - 255
JO - Electrochemical Society Extended Abstracts
JF - Electrochemical Society Extended Abstracts
ER -