Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment

Keyphrases

• Low Temperature 100%
• UV-ozone 100%
• Microfluidics 100%
• Ozone Surface Treatment 100%
• Low-temperature Bonding 100%
• Surface Chemistry 66%
• Fabrication Technology 33%
• Bond Strength 33%
• Glass Transition Temperature 33%
• Polymer Substrate 33%
• X-ray Photoelectron Spectroscopy Analysis 33%
• Surface Treatment 33%
• Hydrophilicity 33%
• Wall Surfaces 33%
• UV-ozone Treatment 33%
• Microfluidic Device 33%
• Thermoplastic Microfluidics 33%
• Electroosmotic Flow 33%
• Solvent Exposure 33%
• High-throughput Fabrication 33%
• O3 Exposure 33%
• Surface Following 33%
• Treated Surface 33%

Engineering

• Low-Temperature 100%
• Microchannel 25%
• Ray Photoelectron Spectroscopy 25%
• Bond Strength 25%
• Polymer Substrate 25%
• Electroosmotic Flow 25%
• Microfluidic Device 25%
• Hydrophilicity 25%