Laser-assisted plasma-enhanced chemical vapor deposition of silicon nitride thin film

Hung Sheng Tsai, Gwo Juinn Jaw, Sheng Hsiung Chang, Chao Chia Cheng, Ching Ting Lee, Hai Pei Liu

研究成果: 雜誌貢獻期刊論文同行評審

13 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds