Kinetic modeling of the NF3 decomposition via dielectric barrier discharges in N2/NF3 mixtures

Hsin Liang Chen, How Ming Lee, Moo Been Chang

研究成果: 雜誌貢獻期刊論文同行評審

12 引文 斯高帕斯(Scopus)

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Chemical Compounds

Physics & Astronomy

Engineering & Materials Science