Investigations and improvements of AlInN/GaN HEMTs grown on Si

Jen Inn Chyi, Yue Ming Hsin, Geng Yen Lee, Hsien Chin Chiu

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

This paper reports our continuous efforts and achievements in understanding and improving AlInN/AlN/GaN heterostructure for high performance field-effect transistors and switching devices. AlInN/AlN/GaN high electron mobility transistors (HEMTs) with high electron mobility and low sheet resistance have been demonstrated on 6" Si(111) substrates. It is found that electron mobility of AlInN/AlN/GaN HEMTs is closely related to the presence and quality of the AlN spacer layer, which determines the dominant carrier scattering mechanism. A comparative study on the electrical characteristics of AlInN/AlN/GaN and AlGaN/GaN metal-insulator-semiconductor (MIS)-HEMTs shows that both devices exhibit similar low-frequency noise behavior and no obvious generation-recombination (g-r) noise component, implying carrier number fluctuation is the dominant noise mechanism in both structures.

原文???core.languages.en_GB???
主出版物標題Wide Bandgap Semiconductor Materials and Devices 16
編輯S. Jang, K. Shenai, G. W. Hunter, F. Ren, C. O'Dwyer, K. C. Mishra
發行者Electrochemical Society Inc.
頁面217-222
頁數6
版本1
ISBN(電子)9781607685913
DOIs
出版狀態已出版 - 2015
事件Symposium on Wide Bandgap Semiconductor Materials and Devices 16 - 227th ECS Meeting - Chicago, United States
持續時間: 24 5月 201528 5月 2015

出版系列

名字ECS Transactions
號碼1
66
ISSN(列印)1938-6737
ISSN(電子)1938-5862

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???event.eventtypes.event.conference???Symposium on Wide Bandgap Semiconductor Materials and Devices 16 - 227th ECS Meeting
國家/地區United States
城市Chicago
期間24/05/1528/05/15

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