Investigation on the differential quadrature Fabry-Pérot interferometer with variable measurement mirrors

Yi Chieh Shih, Pi Cheng Tung, Wen Yuh Jywe, Chung Ping Chang, Lih Horng Shyu, Tung Hsien Hsieh

研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)


Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry-Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry-Pérot interferometer. Although a polarized Fabry-Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry-Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry-Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry-Pérot interferometer is feasible for precise displacement measurement.

期刊Applied Sciences (Switzerland)
出版狀態已出版 - 9月 2020


深入研究「Investigation on the differential quadrature Fabry-Pérot interferometer with variable measurement mirrors」主題。共同形成了獨特的指紋。