TY - JOUR
T1 - Investigation of thin TiO 2 films cosputtered with Si species
AU - Hsu, Jin Cherng
AU - Lee, Cheng Chung
AU - Chen, Huang Lu
AU - Kuo, Chien Cheng
AU - Wang, Paul W.
PY - 2009/2/15
Y1 - 2009/2/15
N2 - Titanium dioxide (TiO 2 ) films were fabricated by cosputtering titanium (Ti) target and SiO 2 or Si slice with ion-beam-sputtering deposition (IBSD) technique and were postannealed at 450 °C for 6 h. The variations of oxygen bonding, which included high-binding-energy oxygen (HBO), bridging oxygen (BO), low-binding-energy oxygen (LBO), and three chemical states of titanium (Ti 4+ , Ti 3+ and Ti 2+ ) were analyzed by X-ray photoelectron spectroscopy (XPS). The enhancement of HBO and reduction of BO in O 1s spectra as functions of SiO 2 or Si amount in cosputtered film imply the formation of Si-O-Ti linkage. Corresponding increase of Ti 3+ in Ti 2p spectra further confirmed the property modification of the cosputtered film resulting from the variation of the chemical bonding. An observed correlation between the chemical structure and optical properties, refractive index and extinction coefficient, of the SiO 2 or Si cosputtered films demonstrated that the change of chemical bonding in the film results in the modification of optical properties. Furthermore, it was found that the optical properties of the cosputtered films were strongly depended on the cosputtering targets. In case of the Si cosputtered films both the refractive indices and extinction coefficients were reduced after postannealing, however, the opposite trend was observed in SiO 2 cosputtered films.
AB - Titanium dioxide (TiO 2 ) films were fabricated by cosputtering titanium (Ti) target and SiO 2 or Si slice with ion-beam-sputtering deposition (IBSD) technique and were postannealed at 450 °C for 6 h. The variations of oxygen bonding, which included high-binding-energy oxygen (HBO), bridging oxygen (BO), low-binding-energy oxygen (LBO), and three chemical states of titanium (Ti 4+ , Ti 3+ and Ti 2+ ) were analyzed by X-ray photoelectron spectroscopy (XPS). The enhancement of HBO and reduction of BO in O 1s spectra as functions of SiO 2 or Si amount in cosputtered film imply the formation of Si-O-Ti linkage. Corresponding increase of Ti 3+ in Ti 2p spectra further confirmed the property modification of the cosputtered film resulting from the variation of the chemical bonding. An observed correlation between the chemical structure and optical properties, refractive index and extinction coefficient, of the SiO 2 or Si cosputtered films demonstrated that the change of chemical bonding in the film results in the modification of optical properties. Furthermore, it was found that the optical properties of the cosputtered films were strongly depended on the cosputtering targets. In case of the Si cosputtered films both the refractive indices and extinction coefficients were reduced after postannealing, however, the opposite trend was observed in SiO 2 cosputtered films.
KW - Bridging oxygen
KW - Cosputtering
KW - High-binding-energy oxygen
KW - Ion-beam-sputtering deposition
KW - Low-binding-energy oxygen
KW - Titanium dioxide
KW - X-ray photoelectron spectroscopy
UR - http://www.scopus.com/inward/record.url?scp=60249100589&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2008.12.016
DO - 10.1016/j.apsusc.2008.12.016
M3 - 期刊論文
AN - SCOPUS:60249100589
SN - 0169-4332
VL - 255
SP - 4852
EP - 4858
JO - Applied Surface Science
JF - Applied Surface Science
IS - 9
ER -