TY - GEN
T1 - Intelligent integral backstepping sliding-mode control for piezo-flexural nanopositioning stage
AU - Lin, Faa Jeng
AU - Lee, Shih Yang
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/12/18
Y1 - 2015/12/18
N2 - An intelligent integral backstepping sliding-mode control (IIBSMC) system using a recurrent neural network (RNN) is proposed for the three-dimension motion control of a piezo-flexural nanopositioning stage (PFNS) in this study. Moreover, the RNN estimator is proposed to estimate the lumped uncertainty including the system parameters and external disturbance online. Furthermore, the online tuning law for the training of the parameters of the RNN is derived using the Lyapunov stability theorem. In addition, a robust compensator is proposed to confront the minimum reconstructed error occurred in the IIBSMC system. Finally, some experimental results are given to demonstrate the validity of the proposed IIBSMC system. From the performance measurings of the proportional-integral (PI) control, sliding mode control (SMC), integral backstepping sliding-mode control (IBSMC) and IIBSMC systems, the proposed IIBSMC system has the lowest maximum, average and standard deviation of the position tracking errors for the three-dimension motion control of the PFNS.
AB - An intelligent integral backstepping sliding-mode control (IIBSMC) system using a recurrent neural network (RNN) is proposed for the three-dimension motion control of a piezo-flexural nanopositioning stage (PFNS) in this study. Moreover, the RNN estimator is proposed to estimate the lumped uncertainty including the system parameters and external disturbance online. Furthermore, the online tuning law for the training of the parameters of the RNN is derived using the Lyapunov stability theorem. In addition, a robust compensator is proposed to confront the minimum reconstructed error occurred in the IIBSMC system. Finally, some experimental results are given to demonstrate the validity of the proposed IIBSMC system. From the performance measurings of the proportional-integral (PI) control, sliding mode control (SMC), integral backstepping sliding-mode control (IBSMC) and IIBSMC systems, the proposed IIBSMC system has the lowest maximum, average and standard deviation of the position tracking errors for the three-dimension motion control of the PFNS.
UR - http://www.scopus.com/inward/record.url?scp=84962433211&partnerID=8YFLogxK
U2 - 10.1109/IFEEC.2015.7361416
DO - 10.1109/IFEEC.2015.7361416
M3 - 會議論文篇章
AN - SCOPUS:84962433211
T3 - 2015 IEEE 2nd International Future Energy Electronics Conference, IFEEC 2015
BT - 2015 IEEE 2nd International Future Energy Electronics Conference, IFEEC 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2nd IEEE International Future Energy Electronics Conference, IFEEC 2015
Y2 - 1 November 2015 through 4 November 2015
ER -
